ZSX 400 Wavelength Dispersive X-ray Fluorescence Spectrometer

Description

The Rigaku ZSX 400 is a wavelength-dispersive X-ray fluorescence (WDXRF) spectrometer engineered for the analysis of exceptionally large or heavy specimens. It accommodates samples with dimensions up to 400 mm in diameter and 50 mm in thickness, with a maximum weight of 30 kg. This capability makes it suitable for applications involving sputtering targets, magnetic storage disks, multilayer film characterization, and the elemental analysis of bulky industrial samples. The system employs a sequential measurement principle with a high-power X-ray tube, available in 3 kW or 4 kW configurations with a rhodium anode operating at up to 60 kV. Detection is handled by a scintillation counter for heavy elements and a flow proportional counter for light elements, with an automatic attenuator exchanger. A defining feature is its customizable sample adapter system, which uses optional inserts to fit various sample geometries. The analysis spot size is adjustable from 30 mm down to 0.5 mm in diameter via a five-step automatic selector, and the instrument supports mapping functions for multi-point uniformity checks. An optional real-time camera allows for visual confirmation of the measurement location. The spectrometer maintains full WDXRF analytical performance, capable of quantifying elements from beryllium (Be) to uranium (U) in solid, liquid, powder, and thin-film states, with detection ranges from parts per million to high percentages and thickness measurements from sub-angstrom to millimeter scales. An optional diffraction peak interference rejection feature is available for analyzing single-crystal substrates. The instrument is designed with a reduced physical footprint compared to earlier models and complies with SEMI standards and CE marking requirements.