X'Pert<sup>3</sup> MRD XL Materials Research X-ray Diffraction System
Manufacturer: Malvern Panalytical
SKU: X'Pert<sup>3</sup> MRD XL
Description
The X'Pert3 MRD XL is a variant of the materials research X-ray diffractometer engineered for large-format samples. It shares the core analytical capabilities of the standard MRD model, performing high-resolution diffraction, scattering, reflectivity, and thin-film analysis. A primary differentiator is its capacity to handle wafers with diameters up to 300 mm. The system incorporates a high-resolution goniometer with Heidenhain encoders and is powered by a 3 kW generator that supports various anode materials. An optional, sophisticated automatic wafer loader enables it to function as an 'in-wall' system, allowing wafers to be loaded from a cleanroom environment onto a self-centering holder. This configuration is designed for high-throughput semiconductor and advanced materials research facilities.
Specifications
| Item | X'Pert3 MRD XL Materials Research X-ray Diffraction System |
| Company | Malvern Panalytical |
| Catalog Number | X'Pert<sup>3</sup> MRD XL |
| Quantity | EA |
| Detector(s) | PIXcel3D 3D Detection System, X'Celerator, Xenon Proportional Detector |
| X-Ray Tube | Empyrean X-ray tube, choice of anodes: Cu, Co, Cr, Mo, Ag |
| X-Ray Generator | 3 kW generator supporting all current and future X-ray tubes |
| Goniometer Type | High resolution, with Heidenhain encoders |
| Scanning radius | Inquire |
| Analysis Diameter | up to 300 mm |
| Sample Type | Thin films, solid objects |
| Element Range | N/A |