X'Pert<sup>3</sup> MRD Materials Research X-ray Diffraction System
Manufacturer: Malvern Panalytical
SKU: X'Pert 3 MRD
Description
The X'Pert3 MRD is a materials research X-ray diffractometer configured for detailed structural investigation. It is applicable for analyzing advanced semiconductors, thin films, and nanomaterials using various X-ray scattering techniques. These methods include high-resolution diffraction, in-plane diffraction, reflectivity, thin-film phase analysis, wafer mapping, GISAXS, and studies of stress, texture, and non-ambient conditions. Key technical components include a high-resolution goniometer with Heidenhain encoders for precise positioning and a 3 kW generator compatible with multiple X-ray tube anodes (Cu, Co, Cr, Mo, Ag). Detection is handled by systems such as the PIXcel3D 3D detector, the X'Celerator, and a Xenon Proportional Detector. The system features a five-axis cradle that supports and maps wafers with diameters up to 150 mm (6 inches).
Specifications
| Item | X'Pert3 MRD Materials Research X-ray Diffraction System |
| Company | Malvern Panalytical |
| Catalog Number | X'Pert 3 MRD |
| Quantity | EA |
| Detector(s) | PIXcel3D 3D Detection System, X'Celerator, Xenon Proportional Detector |
| X-Ray Tube | Empyrean X-ray tube, choice of anodes: Cu, Co, Cr, Mo, Ag |
| X-Ray Generator | 3 kW generator supporting all current and future X-ray tubes |
| Goniometer Type | High resolution, with Heidenhain encoders |
| Scanning radius | Inquire |
| Analysis Diameter | Inquire |
| Sample Type | Thin films, Solid objects |
| Element Range | N/A |