SS-94000SXES/SS-94040SXSER Soft X-Ray Emission Spectrometer (SXES)

Description

JEOL's Soft X-ray Emission Spectrometer (SXES) represents an advanced wavelength-dispersive spectrometer designed for the analysis of low-energy X-rays. It employs a variable space grating to collect spectral data in parallel across specific energy ranges. The standard SXES model covers 50 eV to 210 eV, while the extended-range version (SXES-ER) operates from 100 eV to approximately 2300 eV. The system provides high spectral resolution, on the order of 0.3 eV, enabling the separation of closely spaced emission lines. This high resolution, combined with sensitivity to low concentrations, allows for the detection of light elements like lithium. A significant capability of the SXES is chemical state analysis; it can differentiate between materials with the same elemental composition based on differences in their valence or conduction band electron transitions, such as distinguishing between diamond, graphite, and amorphous carbon. The spectrometer is compatible with JEOL's field-emission scanning electron microscopes and electron probe microanalyzers.