microCMA Compact Auger Analyzer

Description

RBD Instruments' microCMA is a compact cylindrical mirror analyzer (CMA) for Auger electron spectroscopy (AES). This non-scanning, surface-sensitive analyzer is engineered for applications where elemental composition data from the top few atomic layers is required, but imaging capability is not. Its design focuses on a proven second-order focusing CMA geometry, which provides high transmission and resolution. The unit is notably compact, designed to mount on a standard 70 mm (2.75-inch) outer diameter flange, requiring a 1.52-inch inner diameter tube. It interfaces via USB and is controlled through dedicated software described as straightforward to operate. With a specified signal-to-noise ratio of 100:1 on a clean silver sample using a 300 nA beam current, the instrument is suited for quantitative analysis of thin films and surface contaminants. Typical applications include measuring passive oxide thickness on semiconductors and metals, analyzing thermal oxides on metal components, investigating integrated circuit contamination, characterizing sputtered or deposited layers via depth profiling, and quantifying light element surface films.