JXA-iSP100 Electron Probe Micro-Analyzer

Description

The JXA-iSP100 from JEOL USA is an electron probe micro-analyzer (EPMA) designed for high-resolution imaging and precise quantitative elemental analysis. It achieves a spatial resolution of 6 nm, which can be improved to 5 nm with an optional LaB6 emitter, across an accelerating voltage range from 0.2 to 30 kV. The instrument provides a stable, high probe current essential for accurate analytical performance. Its operation is facilitated by a modern graphical user interface (GUI) adapted from JEOL's FEG SEM platform, featuring streamlined workflows under the 'Easy EPMA' mode. This software includes guided procedures suitable for users of varying experience levels, alongside automated functions for both the SEM column and integrated optical microscope. Analytical capabilities are enhanced by a customizable configuration of wavelength-dispersive spectrometers (WDS). The system supports both beam-scanned and stage-scanned mapping and line scans for flexible area analysis. An integrated 30mm² ultra-thin window silicon drift detector (UTW-SDD) for energy-dispersive spectroscopy (EDS) includes an in-situ aperture wheel, allowing for high beam current operation without degrading EDS resolution. The specimen chamber is compatible with cathodoluminescence (CL) systems, including a fully quantitative hyperspectral system, without compromising WDS functionality. The platform also supports optional soft X-ray emission spectrometers (SXES) for the analysis of ultra-light elements and chemical states.