JXA-iHP200F Field Emission Electron Probe Micro-Analyzer

Description

The JXA-iHP200F is a field emission electron probe micro-analyzer (EPMA), an instrument specialized for quantitative elemental analysis at micron and sub-micron scales. It combines a high-resolution field emission electron gun with wavelength-dispersive X-ray spectrometers (WDS). A key specification is its ability to deliver a high and stable probe current to the sample, with a maximum of 3 µA at 30 kV. This high current capability is crucial for achieving sufficient X-ray counts, especially at lower accelerating voltages, enabling fast and high spatial resolution microanalysis. The system supports both beam-scanned and stage-scanned operations for creating line scans and elemental maps over large sample areas. It features a flexible, customizable configuration for its spectrometers and analyzing crystals. The instrument is compatible with JEOL's Soft X-ray Emission Spectrometers (SXES), which are used for detecting low-energy X-rays and providing chemical state information. The operational software includes a graphical user interface designed to simplify workflow, referred to as 'Easy EPMA.' This interface provides guided procedures suitable for users with varying levels of experience, from novice operators to advanced scientists requiring full access to the instrument's analytical capabilities.