JSM-IT710 High Resolution Large Chamber SEM

Description

The JSM-IT710HR is a field emission scanning electron microscope (FE-SEM) engineered for high spatial resolution imaging and analysis. It utilizes a Schottky field emission gun and an in-lens design to deliver a high probe current while maintaining a small probe diameter. The instrument achieves a resolution of 1.0 nm at 20 kV in high vacuum mode and 1.8 nm at 15 kV in low vacuum mode with a backscattered electron detector. The accelerating voltage range is 5 to 30 kV, with a maximum probe current of 300 nA. It features a large specimen chamber capable of holding samples up to 200 mm in diameter and 75 mm in height, which includes an internal, mechanically eucentric stage. This design facilitates the loading of large or heavy specimens. The SEM supports both high and low vacuum modes for examining a variety of sample types. The system is equipped with multiple ports for analytical attachments, including energy-dispersive X-ray spectroscopy (EDS), electron backscatter diffraction (EBSD), wavelength-dispersive spectrometers (WDS), and cathodoluminescence (CL) detectors. Operational features include automated functions for alignment and focus, an integrated optical camera for navigation, and software for creating large-area image montages. Analytical models include a fully embedded EDS system for live spectral and elemental mapping. The instrument also supports remote control, live web viewing, and is compatible with Python scripting for workflow automation.