JSM-IT510 Analytical SEM

Description

The JSM-IT510 is an analytical scanning electron microscope (SEM) from JEOL, designed to integrate intelligent automation with versatile analytical capabilities. It operates with a tungsten filament electron source, with an optional lanthanum hexaboride (LaB6) emitter. The instrument provides a resolution of 3.0 nm at 30 kV in high vacuum mode and 4.0 nm at 30 kV in low vacuum mode when using a backscattered electron detector. Its accelerating voltage is adjustable from 0.3 to 30 kV, with probe current ranging from 1 pA to 1 µA. The specimen chamber is notably large, accommodating samples up to 200 mm in diameter and 90 mm in height. This SEM series is offered in several configurations, including high vacuum and low vacuum models, with or without an embedded energy-dispersive X-ray spectroscopy (EDS) system. The design includes an internal stage, allowing for the positioning of large or heavy specimens before chamber evacuation. Key operational features include an integrated optical camera for navigation, automated functions for alignment and focusing, and software for automated image collection at multiple locations. Analytical models incorporate a live EDS system for real-time spectral and elemental mapping. The platform supports the attachment of various detectors and accessories, such as wavelength-dispersive spectrometers (WDS), electron backscatter diffraction (EBSD) systems, cathodoluminescence (CL) detectors, and scanning transmission electron microscopy (STEM) detectors.