AccuSizer® SPOS Systems

Description

AccuSizer SPOS Systems represent a family of liquid particle counters from Entegris, all based on Single Particle Optical Sizing (SPOS) technology. These instruments are engineered to deliver high accuracy and resolution for determining both particle size distribution and concentration in various suspensions. The technology's core principle involves the direct measurement of individual particles using a combination of light extinction and scattering detectors. This approach provides an extended dynamic range, from 0.15 µm to 400 µm, and avoids the distribution broadening common to ensemble measurement techniques. A key application is the sensitive detection of trace large particles (LPC) in materials like CMP slurries, protein aggregates, or emulsion tails (e.g., PFAT5). The systems utilize fast, multi-channel analyzers that can categorize particles into up to 1024 discrete size channels. To accommodate different sample concentrations, several fluidics configurations are offered, including direct injection and automated dilution systems to prevent particle coincidence errors and ensure accurate counting. Typical measurement cycles are completed in less than ten seconds.