AccuSizer Mini Liquid Particle Count and Size Analyzer

Description

The AccuSizer Mini Liquid Particle Count and Size Analyzer is an online instrument designed for continuous monitoring of particle populations in liquid process streams. Based on Entegris's SPOS technology, it provides real-time data on particle size and count. Its modular architecture allows sensor and fluidics components to be selected based on the specific slurry or suspension being analyzed, such as CMP slurries. The system can cover a broad size range from 0.15 to 400 micrometers. By delivering high-resolution data at high count rates, it enables reliable detection of trace large particle counts (LPC) that can impact product quality. This makes it a valuable tool for process control, filtration optimization, and quality assurance in industrial settings.