AccuSizer Mini FX System
Manufacturer: Entegris
SKU: MINIFX1
Description
The AccuSizer Mini FX System is a compact particle analysis instrument configured for specific industrial applications, such as monitoring ceria chemical-mechanical planarization (CMP) slurries. It utilizes the core SPOS (Single Particle Optical Sizing) technique within a modular design. This particular FX configuration has a measuring range of 0.65 to 20 micrometers and can handle concentrations up to 10^6 particles per mL. It employs a single-stage dilution fluidics system to prepare samples for the sensor. The instrument's focus is on providing high-accuracy counts of large particles (LPC) in process streams, which can be critical for optimizing filtration, maintaining slurry quality, and preventing yield loss in semiconductor manufacturing.
Specifications
| Item | AccuSizer Mini FX System |
| Company | Entegris |
| Catalog Number | MINIFX1 |
| Quantity | EA |
| Type | Single Particle Optical Sizing |
| Detector(s) | Extinction, Scattering, Collimated, and/or Focused (sensor dependent) |
| Measuring Range | 0.65 to 20 µm, up to 106 particles/mL |
| Applications | Materials Testing, Pharmaceutical Lab |