2830 ZT WDXRF Wafer Analyzer

Description

The Malvern Panalytical 2830 ZT is a wavelength dispersive X-ray fluorescence (WDXRF) analyzer specifically configured for semiconductor wafer characterization. It is designed to measure film thickness, layer composition, dopant concentrations, and surface uniformity on wafers with diameters up to 300 mm. The system is built around a 4 kW SST-mAX X-ray tube, which incorporates ZETA technology. This technology is intended to compensate for the effects of tube aging, aiming to maintain consistent analytical performance over the tube's operational lifetime. Detection is handled by a combination of a Hi-Per scintillation detector and a duplex detector. The specific goniometer type and other detailed operational parameters are available upon inquiry. This instrument is suited for non-destructive, high-precision analysis in semiconductor fabrication and research environments.