PIE Scientific

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PIE Scientific specializes in developing plasma technology for ion and electron beam applications. It is founded by alumni of the plasma and ion source technology group in the Lawrence Berkeley National Laboratory. After a decade of experience in developing high-resolution high-throughput electron beam inspection (EBI) and review (EBR) equipment for semiconductor industry, the founders realized that previous generations of plasma cleaners for contamination removal in electron microscopes don't meet the challenging requirements from the semiconductor industry. Therefore, they decided to use their expertise in plasma sources and electron beam microscopes and developed a state-of-the-art plasma cleaning solution for electron microscope industry. The smartCleanâ„¢ technology has been well-received by the electron beam inspection and electron beam review equipment vendors. Please visit the website of PIE Scientific LLC (www.piescientific.com) for more details. Remote plasma cleaner for scanning electron microscopes (SEM)